Automated Design for Micromachining: Strain Gauge

Introduction

This pcell creates a dual bent-beam strain-gauge.

Parameters

Any parameter may be modified, if necessary, to meet design rules. Typically, this involves increasing parameters that specify distances, so that minimum line width and minimum line spacing rules will not be violated. This has been extended to the convention of specifying a zero for some parameters to obtain an instance of the minimum size.

In addition to the parameters listed below, several technology parameters also influence the implementation of parameterized cells. This data must be present in the technology library.

Table 1: Parameters for the 'strain_gauge' parameterized cell.
Name	Description	Range	Units	P1	P2	DT
length	The length of the meter. The meter may actually be longer than specified if the specified length is not divisible by the layer's minimum width and spacing without remainder.	[0,∞)	um	+	+	+
include_poly0	Check this box to include a POLY0 ground plane under the meter.	true/false	-	+	+	+

References

The documentation for this parameterized cell does not contain any references.