Materials
The following tables are just a quick guide. Please refer to the
MEMS Material
Database for a more complete reference.
Silicon Dioxide (Bulk)
Table 1: Material properties for silicon dioxide.
|
Name
|
Min.
|
Typ.
|
Max.
|
Units
|
|
Coefficient of Thermal Expansion
|
-
|
0.55
|
-
|
10-6°C
|
|
Density
|
2198
|
2206
|
2500
|
Kg/m3
|
|
Thermal Conductivity
|
-
|
1.38
|
-
|
W/m°C
|
|
Yield Strength
|
-
|
8.4
|
-
|
GPa
|
|
Young's Modulus
|
-
|
73
|
-
|
GPa
|
Silicon (Bulk)
Table 2: Material properties for silicon.
|
Name
|
Min.
|
Typ.
|
Max.
|
Units
|
|
Coefficient of Thermal Expansion
|
2.3
|
2.5
|
4.3
|
10-6°C
|
|
Density
|
2300
|
2330
|
2330
|
Kg/m3
|
|
Poisson's Ratio
|
0.22
|
0.22
|
0.278
|
|
|
Thermal Conductivity
|
-
|
157
|
-
|
W/m°C
|
|
Yield Strength
|
-
|
7.0
|
-
|
GPa
|
|
Young's Modulus
|
62
|
165
|
202
|
GPa
|
