The following actuators are available:
| Title | Skill File(s) | Description |
|---|---|---|
| Comb, Linear | comb_linear.il | The linear comb uses electro-static attraction to provide movement. It consists of a stator, which is fixed to the surface, and a rotor. The stator and rotor have a number of closely spaced finger which provide the electro-static attraction. Linear combs can also be used as a sensing element. |
| Heatuator | heatuator.il | This cell implements the standard form of the Guckel electro-thermal actuator. It is a 'U' shaped structure that uses differential thermal expansion to achieve motion along the wafer surface. |
| Heatuator Array | heatuator_array.il, heatuator_array_dt.il | This cell implements a team of electro-thermal actuators. Each actuator is a Guckel electro-thermal actuator. |
| Vertical Heatuator | heatuator_vert.il | This device is very similar to the horizontal heatuator. However, this device moves in a direction perpendicular to the wafer surface. |
| Tipuator | tipuator.il | A thermal-in-plane actuator, also known as a bent-beam actuator, uses electro-thermal effects to heat a bent-beam. To account for the beams expansion, the beam buckles. The buckling motion can be used for actuation. |
