Mid-IR Waveguides and Grating Couplers for 2.7-2.9 micrometers

Synopsis

Integrated silicon photonics strip waveguides and grating couplers are developed for mid-IR wavelengths at 2.7 µm and 2.9 µm. Waveguide loss is measured as a function of width for 2.7 µm light in the vicinity of a prominent OH absorption band, and a loss of less than 2 dB/cm is recorded for the 1.0 µm width waveguide. A fabrication bias metric is determined for accurately developing grating couplers at 2.9 µm on a 500 nm SOI, 3 µm buried-oxide substrate. A high resolution measurement scheme is motivated and measurements indicate that these devices will be capable of studying the Se⁺ donor spin qubit cavity coupling platform proposed by researchers at Simon Fraser University.