Introduction to MEMS MSE 711 (3)

Analytical tools to understand the basics of the fabrication, operation, and design of MEMS (microelectromechanical systems). Fundamental microfabrication techniques and process flow design. Principles of energy transduction, sensing, and actuation at microscopic scales. Advantages and disadvantages of scaling on performance of MEMS. Analysis and modelling of behaviour of simple MEMS. Students are required to complete a project.